Objectives:
Educate and introduce (PhD,MSc,BCh) students to the newest established and emerging concepts and equipments related to fabrication of nanostructures by atomic layer deposition and focused charged particle beams (electrons and ions) and their in-situ characterisation.

Content:

• Context: Classical thin film deposition and lithography concepts for nanostructure fabrication: PVD, CVD, resist based lithography (UV, e-beam, nanoimprint, EUV), lift-off.
• Introduction to novel concepts: templated Atomic Layer Deposition & focused electron/ion beam assisted chemical vapour deposition.
• Introduction to Chemistry of ALD and CVD molecules; Surface and Electron triggered reactions: Fundamentals of Adsorption and Desorption, Vapour Pressure, Surface Diffusion, Dissociation.
• Introduction to Scanning Electron / Ion Microscopes: SEM, Ga-FIB, He-FIB, AuSi-FIB
• Electron / Ion interaction with solids: concepts and simulations
• Analysis with focused electron and ion beams: EDX, EBIC, EBSD, tomography
• Nanofabrication with FIB and FEB: milling, deposition, etching, lithography
• Novel Add-Ons for Nanomanipulation and Nanoanalysis inside electron microscopes: 4-point electrical measurements, positioning systems for nanostructures, magnetic bead detection, mechanical measurements: tensile, bending, and compressive loading of nanostructures, 3D topography with in situ atomic force microscopy, chemical depth profiling by combined FIB-mass spectroscopy.

Required knowledge: Physics and Chemistry at high-school level, general concepts of NanoSciences and Fabrication.

The course is supplemented by 15h lab tutorials (May 2013), covering the following topics:

• Casino/SRIM – Monte Carlo simulations of electron/ion trajectories in solids,
• OOMMF - micromagnetic modeling,
• FEM simulations of selected physical properties of the nanostructures,
• GIS Simulator – simulations of the molecular flux for Gas-Injections-Systems.

ECTS: 3(lecture+seminar) +2(egzam) +2(lab)

Dr Ivo Utke

Ivo Utke has been working in the fields of materials sciences and nanotechnology since he received his Ph.D. in Natural Sciences in 1995 at the Humboldt University in Berlin. He worked for 9 years as a scientist at the Ecole Polytechnique Federale de Lausanne and joined EMPA, the Swiss Federal Laboratories for Materials Science and Technology, in 2004. He is the Deputy Head of the Division for Mechanics of Materials and Nanostructures at EMPA and the Head of the group ‘‘Low Dimensional Materials’’ employing ALD, PVD, and focused electron/ion beam assisted CVD techniques for the deposition of novel materials and architectures based on nanocomposites, oxides, and metals. He has (co-) authored more than 60 scientific publications and edited a book on focused electron and ion beam nanofabrication.

E-mail registration for the course: lgondek@agh.edu.pl